[B-6-3] First LSI Applicable Thin SOI Films Formed by Lateral Solid Phase Epitaxy

H. Ishida¹, F. Aiso¹, M. Mizukami¹, K. Nishihara¹, T. Iguchi¹, D. Ichinose¹, A. Fukumoto¹, T. Suzuki¹, F. Arai¹, I. Mizushima¹ (1.Toshiba Corp.)

https://doi.org/10.7567/SSDM.2009.B-6-3