Process Condition Dependence of Random V<sub>T</sub> Variability in NFETs and PFETs

T. Tsunomura; A. Nishida; K. Takeuchi; S. Inaba; S. Kamohara; K. Terada; T. Hiramoto; T. Mogami

doi:https://doi.org/10.7567/SSDM.2009.B-8-1

[B-8-1] Process Condition Dependence of Random V_T Variability in NFETs and PFETs

T. Tsunomura¹, A. Nishida¹, K. Takeuchi¹, S. Inaba¹, S. Kamohara¹, K. Terada², T. Hiramoto^1,3, T. Mogami¹ (1.MIRAI-Selete(Japan), 2.Hiroshima City Univ.(Japan), 3.Univ. of Tokyo(Japan))

https://doi.org/10.7567/SSDM.2009.B-8-1

2009 International Conference on Solid State Devices and Materials

[B-8-1] Process Condition Dependence of Random VT Variability in NFETs and PFETs

[B-8-1] Process Condition Dependence of Random V_T Variability in NFETs and PFETs