The Japan Society of Applied Physics

[D-1-4] Back-Side Illuminated CMOS Image Sensor Fabricated using Compliant Bump

N. Watanabe1, I. Tsunoda2, T. Takao1, K. Tanaka3, T. Asano1 (1.Kyushu Univ.(Japan), 2.Kyushu Inst. Of Tech.(Japan), 3.Kyushu Sangyo Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.D-1-4