[D-9-1] The Helium Ion Microscope for Interconnect Material Imaging

W. Thompson¹, S. Ogawa², L. Stern¹, L. Scipioni¹, J. Notte¹, L. Farkas¹, L. Barriss¹ (1.Carl Zeiss SMT(USA), 2.Selete(Japan))

https://doi.org/10.7567/SSDM.2009.D-9-1