[D-9-1] The Helium Ion Microscope for Interconnect Material Imaging

W. Thompson¹、S. Ogawa²、L. Stern¹、L. Scipioni¹、J. Notte¹、L. Farkas¹、L. Barriss¹ (1.Carl Zeiss SMT(USA)、2.Selete(Japan))

https://doi.org/10.7567/SSDM.2009.D-9-1