[E-7-1] Performance Improvement of Poly-Si Nanowire Transistors Featuring In-Situ Doped Source/Drain

W. C. Chen¹, H. C. Lin^1,2, Y. C. Chang¹, T. Y. Huang¹ (1.National Chiao Tung Univ.(Taiwan), 2.National Nano Device Lab. (Taiwan))

https://doi.org/10.7567/SSDM.2009.E-7-1