[E-7-4] Impact of adequate selection of channel direction on (001) and (110) wafer orientation for strained nanowire transistors

A. Seike¹, H. Takai¹, I. Tsuchida¹, J. Masuda², D. Kosemura², A. Ogura², T. Watanabe¹, I. Ohdomari¹ (1.Waseda Univ.(Japan), 2.Meiji Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.E-7-4