[E-8-2] Electric Characterization of Carbon Nanotubes Grown at Low Temperature by Remote Plasma Chemical Vapor Deposition for LSI Interconnects

M. Iizuka¹、D. Yokoyama¹、K. Ishimaru¹、I. Yuitho¹、T. Takeuchi¹、S. Sato²、M. Nihei²、Y. Awano²、H. Kawarada¹ (1.Waseda Univ.(Japan)、2.MIRAI-Selete(Japan))

https://doi.org/10.7567/SSDM.2009.E-8-2