The Japan Society of Applied Physics

[E-8-2] Electric Characterization of Carbon Nanotubes Grown at Low Temperature by Remote Plasma Chemical Vapor Deposition for LSI Interconnects

M. Iizuka1、D. Yokoyama1、K. Ishimaru1、I. Yuitho1、T. Takeuchi1、S. Sato2、M. Nihei2、Y. Awano2、H. Kawarada1 (1.Waseda Univ.(Japan)、2.MIRAI-Selete(Japan))

https://doi.org/10.7567/SSDM.2009.E-8-2