The Japan Society of Applied Physics

[G-2-1] Electrical Defects in Dielectrics for Flash Memories Studied by Trap Spectroscopy by Charge Injection and Sensing (TSCIS)

R. Degraeve1、M. Cho1、B. Govoreanu1、B. Kaczer1、M. B. Zahid1、G. Van den bosch1、J. Van Houdt1、M. Jurczak1、G. Groeseneken1 (1.IMEC)

https://doi.org/10.7567/SSDM.2009.G-2-1