[G-2-1] Electrical Defects in Dielectrics for Flash Memories Studied by Trap Spectroscopy by Charge Injection and Sensing (TSCIS)

R. Degraeve¹, M. Cho¹, B. Govoreanu¹, B. Kaczer¹, M. B. Zahid¹, G. Van den bosch¹, J. Van Houdt¹, M. Jurczak¹, G. Groeseneken¹ (1.IMEC)

https://doi.org/10.7567/SSDM.2009.G-2-1