[G-2-1] Electrical Defects in Dielectrics for Flash Memories Studied by Trap Spectroscopy by Charge Injection and Sensing (TSCIS)

R. Degraeve¹、M. Cho¹、B. Govoreanu¹、B. Kaczer¹、M. B. Zahid¹、G. Van den bosch¹、J. Van Houdt¹、M. Jurczak¹、G. Groeseneken¹ (1.IMEC)

https://doi.org/10.7567/SSDM.2009.G-2-1