The Japan Society of Applied Physics

[G-2-3] Study of Transient Tunneling Current and Charge-Trapping Behaviors of SONOS-type Devices using Pulse-IV Technique

P. Y. Du1,2、H. T. Lue1、S. Y. Wang1、T. Y. Huang2、K. Y. Hsieh1、R. Liu1、C. Y. Lu1 (1.Macronix Iint'l Co., Ltd.(Taiwan)、2.National Chiao Tung Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2009.G-2-3