The Japan Society of Applied Physics

[G-2-4] Roles of Traps Generated in Al2O3 Film with respect to Memory Characteristics in MANOS

K. Akiyama1, T. Ozaki1, H. Higashijima1, Y. Tanaka1, T. Shibata1, Y. Akasaka1, T. Kaitsuka1 (1.Tokyo Electron Ltd.)

https://doi.org/10.7567/SSDM.2009.G-2-4