Roles of Traps Generated in Al<sub>2</sub>O<sub>3</sub> Film with respect to Memory Characteristics in MANOS

2009 International Conference on Solid State Devices and Materials

Oct 6, 2009 - Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan

K. Akiyama¹, T. Ozaki¹, H. Higashijima¹, Y. Tanaka¹, T. Shibata¹, Y. Akasaka¹, T. Kaitsuka¹ (1.Tokyo Electron Ltd.)