[G-2-4] Roles of Traps Generated in Al₂O₃ Film with respect to Memory Characteristics in MANOS

K. Akiyama¹、T. Ozaki¹、H. Higashijima¹、Y. Tanaka¹、T. Shibata¹、Y. Akasaka¹、T. Kaitsuka¹ (1.Tokyo Electron Ltd.)

https://doi.org/10.7567/SSDM.2009.G-2-4