The Japan Society of Applied Physics

[G-3-2] Thickness Effect on Read Window in a Two-Bit Nitrided-based Trapping Storage Cell

G. D. Lee1, C. H. Cheng1, S. H. Ku1, C. H. Liu1, S. H. Kuo1, C. H. Lee1, S. W. Huang1, N. K. Zous1, M. S. Chen1, W. P. Lu1, K. C. Chen1, C. Y. Lu1 (1.Macronix Int'l Co., Ltd.)

https://doi.org/10.7567/SSDM.2009.G-3-2