[G-6-1] Overview and Future Challenge of High Density FeRAM

I. Kunishima¹、Y. Shimojo¹、A. Konno¹、J. Nishimura¹、T. Okada¹、H. Nakaki¹、Y. Yamada¹、S. Kitazaki¹、H. Furuhashi¹、Y. Minami¹、H. Kanaya¹、S. Shuto¹、K. Tomioka¹、K. Natori¹、K. Yamakawa¹、S. Shiratake¹、D. Takashima¹、T. Hamamoto¹、Y. Watanabe¹、A. Nitayama¹ (1.Toshiba Corp.)

https://doi.org/10.7567/SSDM.2009.G-6-1