[G-8-6] Low Resistivity V/Al/Mo/Au Ohmic Contacts on AlGaN/GaN Annealed at Low Temperatures

N. Yafune^1,3, M. Nagamori², F. Watanabe², K. Sakuno¹, M. Kuzuhara² (1.Sharp Corp.(Japan), 2.Univ. of Fukui(Japan), 3.JRCM(Japan))

https://doi.org/10.7567/SSDM.2009.G-8-6