Fabrication of InP/InGaAs Undoped Channel MOSFET with Selectively Regrown N<sup>+</sup>-InGaAs Source Region

2009 International Conference on Solid State Devices and Materials

Oct 6, 2009 - Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan

T. Kanazawa¹, H. Saito¹, K. Wakabayashi¹, T. Tajima¹, R. Terao¹, Y. Miyamoto¹, K. Furuya¹ (1.Tokyo Tech)