[K-2-7] Self-aligned Metal Double-gate P-channel Low-temperature Poly-Si TFTs Fabricated by DPSS CW Green Laser Lateral Crystallization

T. Sato¹、K. Hirose²、K. Kitahara²、A. Hara¹ (1.Tohoku Gakuin Univ.(Japan)、2.Shimane Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.K-2-7