[K-2-7] Self-aligned Metal Double-gate P-channel Low-temperature Poly-Si TFTs Fabricated by DPSS CW Green Laser Lateral Crystallization

T. Sato¹, K. Hirose², K. Kitahara², A. Hara¹ (1.Tohoku Gakuin Univ.(Japan), 2.Shimane Univ.(Japan))

https://doi.org/10.7567/SSDM.2009.K-2-7