The Japan Society of Applied Physics

[K-7-6] The Performance of Magnetic Tunnel Junction Integrated on the Back-end Metal Line of CMOS Circuits

T. Endoh1、F. Iga1、S. Ikeda1、K. Miura1,2、J. Hayakawa2、M. Kamiyanagi1、H. Hasegawa1、T. Hanyu1、H. Ohno1 (1.Tohoku Univ.(Japan)、2.Hitachi, Ltd.(Japan))

https://doi.org/10.7567/SSDM.2009.K-7-6