[P-1-13] Voltage Coefficient of Capacitance Modulation for Sm2O3/SiO2 MIM Capacitors
J. J. Yang1、J. D. Chen1、R. Wise2、P. Steinmann2、M. B. Yu3、Y. C. Yeo1、C. Zhu1
(1.National Univ. of Singapore(Singapore)、2.Texas Instruments Inc.(USA)、3.Inst. Of Microelectronics(Singapore))
https://doi.org/10.7567/SSDM.2009.P-1-13