Voltage Coefficient of Capacitance Modulation for Sm2O3/SiO2 MIM Capacitors

J. J. Yang; J. D. Chen; R. Wise; P. Steinmann; M. B. Yu; Y. C. Yeo; C. Zhu

doi:https://doi.org/10.7567/SSDM.2009.P-1-13

[P-1-13] Voltage Coefficient of Capacitance Modulation for Sm₂O₃/SiO₂ MIM Capacitors

J. J. Yang¹、J. D. Chen¹、R. Wise²、P. Steinmann²、M. B. Yu³、Y. C. Yeo¹、C. Zhu¹ (1.National Univ. of Singapore(Singapore)、2.Texas Instruments Inc.(USA)、3.Inst. Of Microelectronics(Singapore))

https://doi.org/10.7567/SSDM.2009.P-1-13

2009 International Conference on Solid State Devices and Materials

[P-1-13] Voltage Coefficient of Capacitance Modulation for Sm2O3/SiO2 MIM Capacitors

[P-1-13] Voltage Coefficient of Capacitance Modulation for Sm₂O₃/SiO₂ MIM Capacitors