Comprehensive Modeling of Threshold Voltage Variability Induced by Plasma Damage in Advanced MOSFETs

2009 International Conference on Solid State Devices and Materials

Oct 6, 2009 - Oct 9, 2009
Sendai Kokusai Hotel, Miyagi, Japan

K. Eriguchi¹, Y. Nakakubo¹, A. Matsuda¹, M. Kamei¹, Y. Takao¹, K. Ono¹ (1.Kyoto Univ.)