[P-1-24] Comprehensive Modeling of Threshold Voltage Variability Induced by Plasma Damage in Advanced MOSFETs

K. Eriguchi¹、Y. Nakakubo¹、A. Matsuda¹、M. Kamei¹、Y. Takao¹、K. Ono¹ (1.Kyoto Univ.)

https://doi.org/10.7567/SSDM.2009.P-1-24