[P-1-8] Threshold Voltage (V_th) Tunability of pMOSFETs with Ternary Hf_xMo_yN_z Metal Gate and Gd₂O₃ High-k Gate Dielectric

H. K. Peng¹, C. S. Lai¹, J. C. Wang¹ (1.Chang Gung Univ.)

https://doi.org/10.7567/SSDM.2009.P-1-8