[P-1-9] High Performance ZnO Thin-Film Transistors using High-ҝ TiHfO Gate Dielectrics

N. C. Su¹, C. C. Huang¹, Y. H. Chen¹, C. K. Chiang¹, H. Y. Huang¹, C. H. Wu², A. Chin³, S. J. Wang¹ (1.National Cheng Kung Univ.(Taiwan), 2.National Chung Hua Univ.(Taiwan), 3.National Chiao Tung Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2009.P-1-9