High Performance ZnO Thin-Film Transistors using High-ҝ TiHfO Gate Dielectrics

N. C. Su; C. C. Huang; Y. H. Chen; C. K. Chiang; H. Y. Huang; C. H. Wu; A. Chin; S. J. Wang

doi:https://doi.org/10.7567/SSDM.2009.P-1-9

[P-1-9] High Performance ZnO Thin-Film Transistors using High-ҝ TiHfO Gate Dielectrics

N. C. Su¹、C. C. Huang¹、Y. H. Chen¹、C. K. Chiang¹、H. Y. Huang¹、C. H. Wu²、A. Chin³、S. J. Wang¹ (1.National Cheng Kung Univ.(Taiwan)、2.National Chung Hua Univ.(Taiwan)、3.National Chiao Tung Univ.(Taiwan))

https://doi.org/10.7567/SSDM.2009.P-1-9

2009 International Conference on Solid State Devices and Materials

[P-1-9] High Performance ZnO Thin-Film Transistors using High-ҝ TiHfO Gate Dielectrics