[P-3-6] Recovery of CHC- and NBTI-induced Degradation on MOSFETs by using Different Annealing Treatments

C. H. Tu¹, S. Y. Chen¹, S. H. Chien¹, H. S. Huang¹, Z. W. Jhou², S. Chou², J. Ko² (1.National Taipei Univ. of Tech.(Taiwan), 2.UMC(Taiwan))

https://doi.org/10.7567/SSDM.2009.P-3-6