[P-3-6] Recovery of CHC- and NBTI-induced Degradation on MOSFETs by using Different Annealing Treatments

C. H. Tu¹、S. Y. Chen¹、S. H. Chien¹、H. S. Huang¹、Z. W. Jhou²、S. Chou²、J. Ko² (1.National Taipei Univ. of Tech.(Taiwan)、2.UMC(Taiwan))

https://doi.org/10.7567/SSDM.2009.P-3-6