[P-4-2] Electrical Characteristics of Engineered ZrO2/SiO2 Tunnel Barrier with a High-k HfO2 Trapping Layer for Non-Volatile Memory
H. W. You1, G. H. Park1, J. W. Jung2, W. J. Cho1
(1.Kwangwoon Univ.(Korea), 2.Sejong Univ.(Korea))
https://doi.org/10.7567/SSDM.2009.P-4-2