[P-7-1] Silicon Lateral Avalanche Photodiodes Fabricated by Standard 0.18 µm Complementary Metal-Oxide-Semiconductor Process

K. Iiyama¹、H. Takamatsu¹、T. Maruyama¹ (1.Kanazawa Univ.)

https://doi.org/10.7567/SSDM.2009.P-7-1