[P-9-2] Characterization of Polycrystalline Silicon Thin-Film Transistors with Nickel-Titanium Oxide Gate Dielectric Coating by Sol-Gel Method

S. C. Wu¹, R. C. Yen¹, C. K. Deng¹, T. S. Chao¹, S. H. Chuang², T. F. Lei¹ (1.National Chiao Tung Univ.(Taiwan), 2.National Univ. of Kaohsiung(Taiwan))

https://doi.org/10.7567/SSDM.2009.P-9-2