[SW-02] Current Status and Future Direction of Plasma-Enhanced Atomic Layer Deposition and Etching

^〇N. Kobayashi¹ (1.Nagoya Univ.(Japan))

2019 International Conference on Solid State Devices and Materials |Mon. Sep 2, 2019 1:40 PM - 2:10 PM

[SW-03] Advanced Plasma Etching for the State-of-the-Arts Memories

^〇H. Hayashi¹ (1.Toshiba Memory Corp.(Japan))

2019 International Conference on Solid State Devices and Materials |Mon. Sep 2, 2019 2:10 PM - 2:40 PM

[SW-04] Machine Learning Approaches for Optimizing Plasma Process and Tool Performances

^〇M. Kagaya¹ (1.Tokyo Electron Technology Solutions Ltd.(Japan))

2019 International Conference on Solid State Devices and Materials |Mon. Sep 2, 2019 3:00 PM - 3:30 PM

[SW-05] Plasma-on-Chip for Biological Application: A Microdevice for Stimulating Single Cell with Non-Thermal Atmospheric Pressure Plasma

^〇S. Kumagai¹ (1.Meijo Univ.(Japan))

2019 International Conference on Solid State Devices and Materials |Mon. Sep 2, 2019 3:30 PM - 4:00 PM

[SW-06] Plasma Process for Automobile Component Area

^〇T. Aoki¹ (1.DENSO Corp.(Japan))

2019 International Conference on Solid State Devices and Materials |Mon. Sep 2, 2019 4:00 PM - 4:30 PM

[SW-Closing] Closing

2019 International Conference on Solid State Devices and Materials |Mon. Sep 2, 2019 4:30 PM - 5:00 PM

[SW-Tour] Laboratory Tour

2019 International Conference on Solid State Devices and Materials |Mon. Sep 2, 2019 5:00 PM - 5:30 PM

[RS-A] Will Memory change in the age of AI, IoT, VR/AR and 5G?

Moderator: N. Takaura¹
Panelists: N. Aoto², D. Bankman³, M. Rathor⁴, M. Tada⁵, C. Yoshimura¹ (1.Hitachi, Ltd.(Japan), 2.Micron Memory Japan(Japan), 3.Stanford University(USA), 4.Arm Ltd.(UK), 5.NEC Corporation(Japan))

2019 International Conference on Solid State Devices and Materials |Wed. Sep 4, 2019 5:00 PM - 6:30 PM

[RS-B] Wide Band Gap and Silicon Power: Vision to Reality

Coordinator: D. Hisamoto¹
Moderator: I. Omura²
Panelists: H. Amano³, M. Higashiwaki⁴, M. Shimoyama⁵, T. Terashima⁶, Y. Uemoto⁷, H. Umezawa⁸ (1.Hitachi, Ltd.(Japan), 2.Kyushu Institute of Technology(Japan), 3.Nagoya Univ.(Japan), 4.NICT(Japan), 5.SUMCO Corp.(Japan), 6.Mitsubishi Electric Corp.(Japan), 7.Panasonic Corp.(Japan), 8.AIST(Japan))

2019 International Conference on Solid State Devices and Materials |Wed. Sep 4, 2019 5:00 PM - 6:30 PM