13:50 〜 14:10
*Yosuke Ohta1, Atsushi Sekiguchi1, Shinji Yamakawa2, Tetsuo Harada2, Takeo Watanabe2, Hiroki Yamamoto3 (1. Litho Tech Japan, 2. University of Hyogo, 3. National Institutes for Quantum Science and Technology)
EUV Lithography
2022年6月29日(水) 13:50 〜 16:00 EUV Lithography (A5)
Chairman:Hiroto Kudoh(Kansai University), Hiroaki Oizumi(GIGAPHOTON Inc.)
13:50 〜 14:10
*Yosuke Ohta1, Atsushi Sekiguchi1, Shinji Yamakawa2, Tetsuo Harada2, Takeo Watanabe2, Hiroki Yamamoto3 (1. Litho Tech Japan, 2. University of Hyogo, 3. National Institutes for Quantum Science and Technology)
14:10 〜 14:30
*Tomohito Kizu1, Shinji Yamakawa2, Takeo Watanabe2, Seiji Yasui1, Tomoyuki Shibagaki1 (1. San-Apro Ltd., 2. Laboratory of Advanced Science and Technology for Industry, University of Hyogo)
14:30 〜 14:50
*Atsunori Nakamoto1, Shinji Yamakawa1, Tetsuo Harada1, Takeo Watanabe1 (1. University of Hyogo)
14:50 〜 15:20
*Hiroki YAMAMOTO Yamamoto1, Yuji Hosaka1, Kimio Yoshimura1, Masahiko Ishino1, Dinh Thanhhung1, Masaharu Nishikino1, Yasunari Maekawa1 (1. National Institutes for Quantum Science and Technology)
15:20 〜 15:50
*JULIUSJOSEPH SANTILLAN1, TOSHIRO ITANI1 (1. Osaka University)
15:50 〜 16:00