Wed. Jun 29, 2022 9:00 AM - 10:25 AM Fundamentals and Applications of Biomimetics Materials and Processes (A13)

Chairman:Atsushi Sekiguchi(Litho Tech Japan), Takayuki Murosaki(Asahikawa Medical University)

Wed. Jun 29, 2022 10:25 AM - 11:25 AM Fundamentals and Applications of Biomimetics Materials and Processes (A13)

Chairman:Hiroyuki Mayama(Asahikawa Medical University), Takayuki Murosaki(Asahikawa Medical University)

Wed. Jun 29, 2022 1:00 PM - 2:00 PM Fundamentals and Applications of Biomimetics Materials and Processes (A13)

Chairman:Atsushi Hozumi(Advanced Industrial Science and Technology), Fujio Tsumori(Kyushu University)

Wed. Jun 29, 2022 9:00 AM - 10:40 AM EUV Lithography (A5)

Chairman:Takeo Watanabe(University of Hyogo), Shinji Yamakawa(University of Hyogo)

Wed. Jun 29, 2022 10:40 AM - 12:00 PM EUV Lithography (A5)

Chairman:Taku Hirayama(HOYA Corp.), Hiroaki Oizumi(GIGAPHOTON Inc.)

Wed. Jun 29, 2022 1:50 PM - 4:00 PM EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Hiroaki Oizumi(GIGAPHOTON Inc.)

Wed. Jun 29, 2022 4:00 PM - 4:55 PM EUV Lithography (A5)

Chairman:Takeo Watanabe(University of Hyogo), Taku Hirayama(HOYA Corp.)

Wed. Jun 29, 2022 4:55 PM - 6:45 PM EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Shinji Yamakawa(University of Hyogo)

Wed. Jun 29, 2022 11:10 AM - 11:30 AM Next Generation Lithography, EB Lithography and Nanotechnology (A1)

Chairman:Yoshio Kawai(Shin-Etsu Chemical), Tsukasa Azuma

Wed. Jun 29, 2022 11:40 AM - 12:00 PM 193 nm Lithography Extension and EUV HVM Readiness (A7)

Chairman:Yoshio Kawai(Shin-Etsu Chemical), Tsukasa Azuma