9:00 AM - 9:30 AM
*Florian Gstrein1,2 (1. Intel, 2. Components Research)
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Schedule
Session information
EUV Lithography
[2A501-04] EUV Lithography I
Wed. Jun 29, 2022 9:00 AM - 10:40 AM EUV Lithography (A5)
Chairman:Takeo Watanabe(University of Hyogo), Shinji Yamakawa(University of Hyogo)
9:30 AM - 10:00 AM
Florian Kaefer1, Zoey Meng2, Rachel Segalman2, *Christopher Ober1 (1. Cornell University, 2. University of California at Santa Barbara)
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Schedule
10:00 AM - 10:30 AM
[2A503] Advances in high NA EUV patterning and fundamental radiation chemistry diagnostics [Invited]
*Patrick Naulleau1 (1. Lawrence Berkeley National Laboratory)
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Schedule
10:30 AM - 10:40 AM
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Schedule