Nanoimprint

[2A601-05] Nanoimprint I

2022年6月29日(水) 13:00 〜 14:40 Nanoimprint (A6)

Chairman:Yoshihiko Hirai(Osaka Metropolitan University), Hiroaki Kawata(Osaka Metropolitan University)

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13:00 〜 13:20

[2A601] Nanoimprint with CO₂ Ambient

*Toshiki ITO¹, Isao KAWATA¹, Yuto ITO¹ (1. Canon Inc.)

13:20 〜 13:40

[2A602] 3D simulation and experiment of the fluid flow around structure with nano step made by UV-NIL

*Tadashi Ando¹, Yusei Honda¹, Tomoki Yanagawa¹, Noriyuki Unno², Jun Taniguchi¹, Shin-ichi Satake¹ (1. Department of Applied Electronics, Faculty of Advanced Engineering, Tokyo University of Science, 2. Department of Mechanical Engineering, Faculty of Engineering, Sanyo-Onoda City University)

13:40 〜 14:00

[2A603] Fabrication of a Rose-Petal-Inspired Micro/Nanostructured Surface via the Ultraviolet Nanoimprint Lithography and Roll-Press Methods

*Kazuki Fujiwara¹, Hiroyuki Sugawara², Jun Taniguchi¹ (1. Tokyo University of Science, 2. GEOMATEC Co., Ltd.)

14:00 〜 14:20

[2A604] Using Machine Learning to Predict the Durability of a Mold for Producing Nanostructures in Ultraviolet Nanoimprint Lithography

Kazuki Okamoto¹, Tomohito Wakasa¹, Jun Taniguchi¹, *Shin-ichi Satake¹ (1. Tokyo University of Science)

14:20 〜 14:40

[2A605] Fabrication of freestanding double-sided through-hole electrode films using imprint technique

Atsuhiro Furuta¹, *Jun Taniguchi¹ (1. Tokyo University of Science)