General Scopes of Photopolymer Science and Technology

[A14] General Scopes of Photopolymer Science and Technology

Thu. Jun 30, 2022 1:00 PM - 2:00 PM General Scopes of Photopolymer Science and Technology (A14)

Chairman:Masayuki Endo(Osaka University)

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1:00 PM - 1:20 PM

[3A1401] Water-soluble bio-sourced resists for DUV lithography in a 200/300mm pilot line environment

*ARNAUD BAZIN¹, Alexandre Teolis², Isabelle Servin¹, Paule Durin³, Olha Sysova⁴, Didier Leonard⁵, Olivier Soppera⁴, Jean-Louis Leclercq³, Yann Chevolot³, Raluca Tiron¹, Stephane Trombotto² (1. Univ. Grenoble Alpes, CEA, LETI, F-38000 Grenoble, France, 2. Univ. Claude Bernard Lyon 1, CNRS, UMR 5223, Ingénierie des Matériaux Polymères, INSA Lyon, Université Jean Monnet, F-69622 VILLEURBANNE Cédex, France, 3. Univ. Lyon, Institut des Nanotechnologies de Lyon UMR CNRS 5270, Ecole Centrale de Lyon, 36 Avenue Guy de Collongue, F-69134 Ecully, France, 4. Univ. de Haute-Alsace, CNRS, IS2M UMR 7361, F-68100 Mulhouse, France, 5. Univ. Lyon, CNRS, Université Claude Bernard Lyon 1, Institut des Sciences Analytiques, UMR 5280, 5, rue de la Doua, F-69100 Villeurbanne, France)

1:20 PM - 1:40 PM

[3A1402] Evaluation of Surface-Enhanced Raman scattering substrate consisting of gold nanoparticles grown on nanoarrays of boehmite fabricated using magnetron sputtering process

*Taku Tanaka¹, Syunya Saegusa¹, Masayuki Naya^2,1, Takao Fukuoka^3,1, Yuichi Utsumi¹, Syo Amano¹, Akinobu Yamaguti¹ (1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo,, 2. Keio University, 3. Kyoto University)

1:40 PM - 2:00 PM

[3A1403] Determination of radiation dose leading to molecular chain destruction of amino acids

*Shunya Saegusa¹, Ryo Nakamura¹, Naoya Akamatsu¹, Yuichi Utsumi¹, Tomoko Ishihara², Masaki Oura³, Akinobu Yamaguchi¹ (1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 2. Japan Synchrotron Radiation Research Institute, 3. RIKEN SPring-8 Center)