09:00 〜 09:30
*Lawrence S Melvin1, Yudhishthir Kankel1, Zachary A Levinson1, Ulrich Welling1, Hironobu Taoka1, Hans-jurgen Stock1, Wolfgang Demmerle1 (1. Synopsys)
Computational / Analytical Approach for Lithography Processes
2022年6月30日(木) 09:00 〜 11:30 Computational / Analytical Approach for Lithography Processes (A4)
Chairman:Tomoki Nagai(JSR Corporation), Takahiro Kozawa(Osaka University)
09:00 〜 09:30
*Lawrence S Melvin1, Yudhishthir Kankel1, Zachary A Levinson1, Ulrich Welling1, Hironobu Taoka1, Hans-jurgen Stock1, Wolfgang Demmerle1 (1. Synopsys)
09:30 〜 10:00
*Takahiro Kozawa1 (1. Osaka University)
10:00 〜 10:30
*Momoji Kubo1 (1. Institute for Materials Research, Tohoku University)
10:30 〜 11:00
Kyohei Imai1, Bunta Inoue1, Yoshihiko Hirai1, *Masaaki Yasuda1 (1. Osaka Metropolitan University)
11:00 〜 11:30
*Kenji Yoshimoto1 (1. Toray Industries, Inc.)