スケジュール 16 14:30 〜 14:50 [2A510] Grazing Incident Resonant Soft X-ray Scattering for the Chemical Structure Size Distribution Analysis in EUV resist. *Atsunori Nakamoto1, Shinji Yamakawa1, Tetsuo Harada1, Takeo Watanabe1 (1. University of Hyogo)