The 39th International Conference of Photopolymer Science and Technology

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EUV Lithography

[2A516-19] EUV Lithography V

Wed. Jun 29, 2022 4:55 PM - 6:45 PM EUV Lithography (A5)

Chairman:Hiroto Kudoh(Kansai University), Shinji Yamakawa(University of Hyogo)

4:55 PM - 5:25 PM

[2A516] Process and Sensitivity Optimisation of the Multi-Trigger Resist [Invited]

Carmen Popescu1, Greg O'Callaghan1, Alexandra McClelland1, John Roth2, Ed Jackson2, *Alex Robinson1 (1. Irresistible Materials, 2. Nano-C)