[A14] 193nm Lithography Extension and EUV HVM Readiness

[3A1403] Determination of radiation dose leading to molecular chain destruction of amino acids

*Shunya Saegusa¹, Ryo Nakamura¹, Naoya Akamatsu¹, Yuichi Utsumi¹, Tomoko Ishihara², Masaki Oura³, Akinobu Yamaguchi¹ (1. Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 2. Japan Synchrotron Radiation Research Institute, 3. RIKEN SPring-8 Center)