[17p-P2-1~49] 8 Plasma Electronics

[17p-P2-20] Preparation of the reduced light-induced degradation a-Si:H films using a remote plasma with the balanced power feeding

^○Shun Okada¹, Hiroshi Muta¹, Satoshi Nishida¹, Shizuma Kuribayashi¹ (Gifu Univ.¹)

Keywords:バラン給電,低光劣化,リモートプラズマ