Optimization of High-Density GaAs Quantum Nanodisks Fabrication Process by the Combination of Bio-template and Neutral Beam Etching

Yosuke Tamura

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.2 Ultrathin films and quantum nanostructures

[17p-E15-1~15] 14.2 Ultrathin films and quantum nanostructures

Mon. Mar 17, 2014 1:15 PM - 5:30 PM E15 (E303)

3:30 PM - 3:45 PM

△ [17p-E15-8] Optimization of High-Density GaAs Quantum Nanodisks Fabrication Process by the Combination of Bio-template and Neutral Beam Etching

^○Yosuke Tamura^1,5, Akio Higo², Cedric Thomas^1,5, Kenichi Yoshikawa¹, Takeru Okada¹, Yunpeng Wang³, Masakazu Sugiyama⁴, Yoshiaki Nakano⁴, Seiji Samukawa^1,2,5 (IFS, Tohoku Univ.¹, WPI-AIMR, Tohoku Univ.², RCAST, The Univ. of Tokyo³, School of Engineering, The Univ. of Tokyo⁴, JST-CREST⁵)

Keywords:量子ドット