Formation of ultrashallow Ohmic contact on n-type Ge by P delta-doping

Presentation information

Oral presentation

15. Crystal Engineering » 15.5 IV-group crystals and IV-IV-group mixed crystals

Tue. Mar 18, 2014 1:30 PM - 6:45 PM F6 (F306)

2:45 PM - 3:00 PM

^○Mchihiro Yamada¹, Yoshihiro Takeuchi², Kentarou Sawano², M. Kohei Itoh¹ (Keio Univ.¹, Tokyo City Univ.²)

Keywords:delta-doping,Ge,Ohmic contact