Mn δ doping into Si : characterization of career transport

Presentation information

Oral presentation

15. Crystal Engineering » 15.5 IV-group crystals and IV-IV-group mixed crystals

Tue. Mar 18, 2014 1:30 PM - 6:45 PM F6 (F306)

2:30 PM - 2:45 PM

^○Koichi Murata^1,2, Satoshi Tsubomatsu^1,2, Takashi Kanazawa^1,2, Tamotsu Koyano², Koh-ichi Nittoh¹, Kazushi Miki^1,2 (NIMS¹, Univ. of Tsukuba²)

Keywords:半導体,ドーピング,マンガン