[21p-135-1~16] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21p-135-12] Development of Alkaline Solution generated by Electrolysis of Organic Ammonium Salt for Wet and Cleaning Process in Semiconductor Manufacturing
-Elucidation of hypochlorite ion decomposition reaction mechanism by organic cation species-

〇Takahiro Kanai¹, Yuuji Nagashima¹, Hideaki Hirabayashi², Masaaki Hirakawa³ (1.Shibaura mechatronics Corp., 2.Toshiba Materials Co.,Ltd., 3.Toshiba Corp.)

Keywords:semiconductor