3:45 PM - 4:00 PM
[15p-B410-10] Investigation on characteristics and variation of low-temperature single crystal Si TFTs
Keywords:semiconductor, silicon, laser crystallization
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology
[15p-B410-1~15] 13.4 Si processing /Si based thin film / MEMS / Equipment technology
Wed. Mar 15, 2023 1:00 PM - 5:30 PM B410 (Building No. 2)
Masato Sone(Tokyo Tech), Fumito Imura(Hundred Semiconductors Inc.)